Migrating from planar to FinFET for further CMOS scaling: SOI or bulk?

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Authors
Mitard, Jerome; Witters, Liesbeth; Mercha, Abdelkarim; Kerner, Christoph; Dittrich, Rok; Rakowski, Michal; Ortolland, Claude; Ragnarsson, Lars-Ake; Parvais, Bertrand; De Keersgieter, An; Kubicek, Stefan; Redolfi, Augusto; Rooyackers, Rita; Vrancken, Christa; Brus, Stephan; Lauwers, Anne; Absil, Philippe; Biesemans, Serge; Hoffmann, Thomas Y.
Conference
35th European Solid-State Circuits Conference - ESSCIRC
Title
Migrating from planar to FinFET for further CMOS scaling: SOI or bulk?
Publication type
Proceedings paper
Embargo date
9999-12-31
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