Ge-based passivation for high permittivity oxide deposition on III-V compounds substrates

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Authors
Molle, A.; Spiga, S.; Lamagna, L.; Fanciulli, M.; Brammertz, Guy; Meuris, Marc
Conference
Abstracts 6th International Conference on Silicon Epitaxy and Heterostructures - ICSI-6
Title
Ge-based passivation for high permittivity oxide deposition on III-V compounds substrates
Publication type
Meeting abstract
Embargo date
9999-12-31
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