AlN on nanocrystalline diamond piezoelectric cantilevers for sensors/actuators
dc.contributor.author | Mortet, Vincent | |
dc.contributor.author | Soltani, A. | |
dc.contributor.author | Talbi, A. | |
dc.contributor.author | Pobedinskas, P. | |
dc.contributor.author | Haenen, Ken | |
dc.contributor.author | de Jaeger, J.C. | |
dc.contributor.author | Pernod, P. | |
dc.contributor.author | Wagner, Patrick | |
dc.date.accessioned | 2021-10-18T00:59:02Z | |
dc.date.available | 2021-10-18T00:59:02Z | |
dc.date.issued | 2009 | |
dc.identifier.issn | 1876-6196 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/15893 | |
dc.source | IIOimport | |
dc.title | AlN on nanocrystalline diamond piezoelectric cantilevers for sensors/actuators | |
dc.type | Journal article | |
dc.contributor.imecauthor | Haenen, Ken | |
dc.contributor.orcidimec | Haenen, Ken::0000-0001-6711-7367 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 40 | |
dc.source.endpage | 43 | |
dc.source.journal | Procedia Chemistry | |
dc.source.issue | 1 | |
dc.source.volume | 1 | |
imec.availability | Published - open access | |
imec.internalnotes | Proceedings Eurosensors XXIII |