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AlN on nanocrystalline diamond piezoelectric cantilevers for sensors/actuators

dc.contributor.authorMortet, Vincent
dc.contributor.authorSoltani, A.
dc.contributor.authorTalbi, A.
dc.contributor.authorPobedinskas, P.
dc.contributor.authorHaenen, Ken
dc.contributor.authorde Jaeger, J.C.
dc.contributor.authorPernod, P.
dc.contributor.authorWagner, Patrick
dc.date.accessioned2021-10-18T00:59:02Z
dc.date.available2021-10-18T00:59:02Z
dc.date.issued2009
dc.identifier.issn1876-6196
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15893
dc.sourceIIOimport
dc.titleAlN on nanocrystalline diamond piezoelectric cantilevers for sensors/actuators
dc.typeJournal article
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage40
dc.source.endpage43
dc.source.journalProcedia Chemistry
dc.source.issue1
dc.source.volume1
imec.availabilityPublished - open access
imec.internalnotesProceedings Eurosensors XXIII


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