AlN on nanocrystalline diamond piezoelectric cantilevers for sensors/actuators

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Authors

Mortet, Vincent; Soltani, A.; Talbi, A.; Pobedinskas, P.; Haenen, Ken; de Jaeger, J.C.; Pernod, P.; Wagner, Patrick

ISSN

1876-6196

Issue

1

Journal

Procedia Chemistry

Volume

1

Title

AlN on nanocrystalline diamond piezoelectric cantilevers for sensors/actuators

Publication type

Journal article

Embargo date

9999-12-31

Collections

Articles