Publication:

AlN on nanocrystalline diamond piezoelectric cantilevers for sensors/actuators

Date

2009
Journal article
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cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0000-0001-6711-7367
cris.virtualsource.departmentc494e08e-6e92-470e-b96b-d20dbbd419b3
cris.virtualsource.orcidc494e08e-6e92-470e-b96b-d20dbbd419b3
dc.contributor.authorMortet, Vincent
dc.contributor.authorSoltani, A.
dc.contributor.authorTalbi, A.
dc.contributor.authorPobedinskas, P.
dc.contributor.authorHaenen, Ken
dc.contributor.authorde Jaeger, J.C.
dc.contributor.authorPernod, P.
dc.contributor.authorWagner, Patrick
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.date.accessioned2021-10-18T00:59:02Z
dc.date.available2021-10-18T00:59:02Z
dc.date.embargo9999-12-31
dc.date.issued2009
dc.identifier.issn1876-6196
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15893
dc.source.beginpage40
dc.source.endpage43
dc.source.issue1
dc.source.journalProcedia Chemistry
dc.source.volume1
dc.title

AlN on nanocrystalline diamond piezoelectric cantilevers for sensors/actuators

dc.typeJournal article
dspace.entity.typePublication
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