Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Articles
AlN on nanocrystalline diamond piezoelectric cantilevers for sensors/actuators
Publication:
AlN on nanocrystalline diamond piezoelectric cantilevers for sensors/actuators
Date
2009
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
20013.pdf
361.26 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Mortet, Vincent
;
Soltani, A.
;
Talbi, A.
;
Pobedinskas, P.
;
Haenen, Ken
;
de Jaeger, J.C.
;
Pernod, P.
;
Wagner, Patrick
Journal
Procedia Chemistry
Abstract
Description
Metrics
Views
1920
since deposited on 2021-10-18
1
last month
Acq. date: 2025-12-08
Citations
Metrics
Views
1920
since deposited on 2021-10-18
1
last month
Acq. date: 2025-12-08
Citations