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Characterization of diamond films grown under continuous DC bias by MW-PECVD – Evidence of ultra-nano-crystalline diamond film growth

dc.contributor.authorMortet, Vincent
dc.contributor.authorZhang, L.
dc.contributor.authorD'Haen, Jan
dc.contributor.authorSoltani, A.
dc.contributor.authorDouhéret, O.
dc.contributor.authorTroadec, D.
dc.contributor.authorVan Tendeloo, G.
dc.contributor.authorWagner, Patrick
dc.contributor.authorHaenen, Ken
dc.date.accessioned2021-10-18T00:59:44Z
dc.date.available2021-10-18T00:59:44Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15895
dc.sourceIIOimport
dc.titleCharacterization of diamond films grown under continuous DC bias by MW-PECVD – Evidence of ultra-nano-crystalline diamond film growth
dc.typeOral presentation
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.source.peerreviewno
dc.source.conferenceHasselt Diamond Workshop - SBDD XIV
dc.source.conferencedate2/03/2009
dc.source.conferencelocationHasselt Belgium
imec.availabilityPublished - imec


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