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Evolution of metastable phases in silicon during nanoindentation: mechanism analysis and experimental verification

dc.contributor.authorMylvaganam, Kausala
dc.contributor.authorZhang, Liangchi
dc.contributor.authorEyben, Pierre
dc.contributor.authorMody, Jay
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-18T01:03:48Z
dc.date.available2021-10-18T01:03:48Z
dc.date.issued2009
dc.identifier.issn0957-4484
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15907
dc.sourceIIOimport
dc.titleEvolution of metastable phases in silicon during nanoindentation: mechanism analysis and experimental verification
dc.typeJournal article
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage305705
dc.source.journalNanotechnology
dc.source.issue30
dc.source.volume20
imec.availabilityPublished - open access


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