Authors

Mylvaganam, Kausala; Zhang, Liangchi; Eyben, Pierre; Mody, Jay; Vandervorst, Wilfried

ISSN

0957-4484

Issue

30

Journal

Nanotechnology

Volume

20

Title

Evolution of metastable phases in silicon during nanoindentation: mechanism analysis and experimental verification

Publication type

Journal article

Embargo date

9999-12-31