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Evolution of metastable phases in silicon during nanoindentation: mechanism analysis and experimental verification
Publication:
Evolution of metastable phases in silicon during nanoindentation: mechanism analysis and experimental verification
Date
2009
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Mylvaganam, Kausala
;
Zhang, Liangchi
;
Eyben, Pierre
;
Mody, Jay
;
Vandervorst, Wilfried
Journal
Nanotechnology
Abstract
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1921
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Acq. date: 2025-10-24
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Metrics
Views
1921
since deposited on 2021-10-18
434
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations