dc.contributor.author | Nguyen, Duy | |
dc.contributor.author | Rosseel, Erik | |
dc.contributor.author | Takeuchi, Shotaro | |
dc.contributor.author | Everaert, Jean-Luc | |
dc.contributor.author | Loo, Roger | |
dc.contributor.author | Goossens, Jozefien | |
dc.contributor.author | Moussa, Alain | |
dc.contributor.author | Clarysse, Trudo | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.date.accessioned | 2021-10-18T01:08:18Z | |
dc.date.available | 2021-10-18T01:08:18Z | |
dc.date.issued | 2009-09 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/15920 | |
dc.source | IIOimport | |
dc.title | Vapor phase doping and sub-melt laser anneal for ultra-shallow extension junctions in sub-32 nm CMOS technology | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Rosseel, Erik | |
dc.contributor.imecauthor | Everaert, Jean-Luc | |
dc.contributor.imecauthor | Loo, Roger | |
dc.contributor.imecauthor | Moussa, Alain | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
dc.contributor.orcidimec | Everaert, Jean-Luc::0000-0002-0660-9090 | |
dc.contributor.orcidimec | Moussa, Alain::0000-0002-6377-4199 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 87 | |
dc.source.endpage | 88 | |
dc.source.conference | 1st International Workshop on Si based Nano-Electronics and -Photonics (SiNEP-09) | |
dc.source.conferencedate | 20/09/2009 | |
dc.source.conferencelocation | Vigo Spain | |
imec.availability | Published - imec | |