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CMP of novel materials

dc.contributor.authorOng, Patrick
dc.contributor.authorKellens, Kristof
dc.contributor.authorChiodarelli, Nicolo
dc.contributor.authorMeuris, Marc
dc.contributor.authorLeunissen, Peter
dc.date.accessioned2021-10-18T01:16:38Z
dc.date.available2021-10-18T01:16:38Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15944
dc.sourceIIOimport
dc.titleCMP of novel materials
dc.typeProceedings paper
dc.contributor.imecauthorOng, Patrick
dc.contributor.imecauthorKellens, Kristof
dc.contributor.imecauthorMeuris, Marc
dc.contributor.orcidimecOng, Patrick::0000-0002-2072-292X
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.source.peerreviewyes
dc.source.conference14th International Symposium on Chemical-Mechanical Planarization - CMP
dc.source.conferencedate9/08/2009
dc.source.conferencelocationLake Placid, NY United States
imec.availabilityPublished - imec


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