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Accurate micro Hall effect measurement on scribe line pads

dc.contributor.authorOsterberg, Frederik
dc.contributor.authorPetersen, Dirch
dc.contributor.authorWang, Fei
dc.contributor.authorRosseel, Erik
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorHansen, Ole
dc.date.accessioned2021-10-18T01:21:43Z
dc.date.available2021-10-18T01:21:43Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15957
dc.sourceIIOimport
dc.titleAccurate micro Hall effect measurement on scribe line pads
dc.typeProceedings paper
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.conference17th Annual IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP
dc.source.conferencedate29/09/2009
dc.source.conferencelocationAlbany, NY USA
imec.availabilityPublished - imec


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