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Drying of high aspect ratio structures: a comparison of drying techniques via electrical stiction analysis

dc.contributor.authorPacco, Antoine
dc.contributor.authorWada, Masayuki
dc.contributor.authorBearda, Twan
dc.contributor.authorMertens, Paul
dc.date.accessioned2021-10-18T01:23:29Z
dc.date.available2021-10-18T01:23:29Z
dc.date.issued2009
dc.identifier.issn1662-9779
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15962
dc.sourceIIOimport
dc.titleDrying of high aspect ratio structures: a comparison of drying techniques via electrical stiction analysis
dc.typeJournal article
dc.contributor.imecauthorPacco, Antoine
dc.contributor.imecauthorMertens, Paul
dc.source.peerreviewyes
dc.source.beginpage87
dc.source.endpage90
dc.source.journalSolid State Phenomena
dc.source.volume145-146
imec.availabilityPublished - imec
imec.internalnotesUCPSS 2008


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