Drying of high aspect ratio structures: a comparison of drying techniques via electrical stiction analysis
dc.contributor.author | Pacco, Antoine | |
dc.contributor.author | Wada, Masayuki | |
dc.contributor.author | Bearda, Twan | |
dc.contributor.author | Mertens, Paul | |
dc.date.accessioned | 2021-10-18T01:23:29Z | |
dc.date.available | 2021-10-18T01:23:29Z | |
dc.date.issued | 2009 | |
dc.identifier.issn | 1662-9779 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/15962 | |
dc.source | IIOimport | |
dc.title | Drying of high aspect ratio structures: a comparison of drying techniques via electrical stiction analysis | |
dc.type | Journal article | |
dc.contributor.imecauthor | Pacco, Antoine | |
dc.contributor.imecauthor | Mertens, Paul | |
dc.source.peerreview | yes | |
dc.source.beginpage | 87 | |
dc.source.endpage | 90 | |
dc.source.journal | Solid State Phenomena | |
dc.source.volume | 145-146 | |
imec.availability | Published - imec | |
imec.internalnotes | UCPSS 2008 |
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