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Drying of high aspect ratio structures: a comparison of drying techniques via electrical stiction analysis
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Authors
Pacco, Antoine
;
Wada, Masayuki
;
Bearda, Twan
;
Mertens, Paul
ISSN
1662-9779
Journal
Solid State Phenomena
Volume
145-146
Title
Drying of high aspect ratio structures: a comparison of drying techniques via electrical stiction analysis
Publication type
Journal article
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