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Drying of high aspect ratio structures: a comparison of drying techniques via electrical stiction analysis
Publication:
Drying of high aspect ratio structures: a comparison of drying techniques via electrical stiction analysis
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Date
2009
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Pacco, Antoine
;
Wada, Masayuki
;
Bearda, Twan
;
Mertens, Paul
Journal
Solid State Phenomena
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1952
since deposited on 2021-10-18
4
last month
Acq. date: 2026-01-06
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Metrics
Views
1952
since deposited on 2021-10-18
4
last month
Acq. date: 2026-01-06
Citations