dc.contributor.author | Pantouvaki, Marianna | |
dc.contributor.author | Zhao, Larry | |
dc.contributor.author | Huffman, Craig | |
dc.contributor.author | Heylen, Nancy | |
dc.contributor.author | Ferchichi, Abdelkarim | |
dc.contributor.author | Ono, Y. | |
dc.contributor.author | Nakajima, M. | |
dc.contributor.author | Nakatani, K. | |
dc.contributor.author | Struyf, Herbert | |
dc.contributor.author | Beyer, Gerald | |
dc.contributor.author | Baklanov, Mikhaïl | |
dc.date.accessioned | 2021-10-18T01:27:00Z | |
dc.date.available | 2021-10-18T01:27:00Z | |
dc.date.issued | 2009 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/15972 | |
dc.source | IIOimport | |
dc.title | Integration of an organic ultra low-k (k=2.2) material | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Pantouvaki, Marianna | |
dc.contributor.imecauthor | Heylen, Nancy | |
dc.contributor.imecauthor | Struyf, Herbert | |
dc.contributor.imecauthor | Beyer, Gerald | |
dc.source.peerreview | no | |
dc.source.conference | Advanced Metallization Conference - AMC | |
dc.source.conferencedate | 12/10/2009 | |
dc.source.conferencelocation | Baltimore, MD USA | |
imec.availability | Published - imec | |
imec.internalnotes | Publ. in 2010 | |