Accidents and incidents in semiconductor manufacturing - Learning from the past
dc.contributor.author | Pardon, Alain | |
dc.date.accessioned | 2021-10-18T01:28:29Z | |
dc.date.available | 2021-10-18T01:28:29Z | |
dc.date.issued | 2009 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/15977 | |
dc.source | IIOimport | |
dc.title | Accidents and incidents in semiconductor manufacturing - Learning from the past | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Pardon, Alain | |
dc.source.peerreview | no | |
dc.source.conference | Solarcon India | |
dc.source.conferencedate | 9/11/2009 | |
dc.source.conferencelocation | Hyderabad India | |
imec.availability | Published - imec |
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