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The device architecture dilemma for CMOS technologies: opportunities & challenges of FinFET over planar MOSFET

dc.contributor.authorParvais, Bertrand
dc.contributor.authorMercha, Abdelkarim
dc.contributor.authorCollaert, Nadine
dc.contributor.authorRooyackers, Rita
dc.contributor.authorFerain, Isabelle
dc.contributor.authorJurczak, Gosia
dc.contributor.authorSubramanian, Vaidy
dc.contributor.authorDe Keersgieter, An
dc.contributor.authorChiarella, Thomas
dc.contributor.authorKerner, Christoph
dc.contributor.authorWitters, Liesbeth
dc.contributor.authorBiesemans, Serge
dc.contributor.authorHoffmann, Thomas Y.
dc.date.accessioned2021-10-18T01:33:53Z
dc.date.available2021-10-18T01:33:53Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15993
dc.sourceIIOimport
dc.titleThe device architecture dilemma for CMOS technologies: opportunities & challenges of FinFET over planar MOSFET
dc.typeProceedings paper
dc.contributor.imecauthorParvais, Bertrand
dc.contributor.imecauthorMercha, Abdelkarim
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorDe Keersgieter, An
dc.contributor.imecauthorChiarella, Thomas
dc.contributor.imecauthorKerner, Christoph
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorBiesemans, Serge
dc.contributor.orcidimecParvais, Bertrand::0000-0003-0769-7069
dc.contributor.orcidimecMercha, Abdelkarim::0000-0002-2174-6958
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.contributor.orcidimecDe Keersgieter, An::0000-0002-5527-8582
dc.contributor.orcidimecChiarella, Thomas::0000-0002-6155-9030
dc.source.peerreviewno
dc.source.beginpage80
dc.source.endpage81
dc.source.conferenceInternational Symposium on VLSI technology, Systems and Applications - VLSI-TSA
dc.source.conferencedate27/04/2009
dc.source.conferencelocationHsinchu Taiwan
imec.availabilityPublished - imec


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