B profile alteration by annealing in reactive ambients

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Authors

Pawlak, Bartek; Cowern, N.E.B.; Vandervorst, Wilfried

ISSN

0003-6951

Issue

2

Journal

Applied Physics Letters

Volume

94

Title

B profile alteration by annealing in reactive ambients

Publication type

Journal article

Embargo date

9999-12-31

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