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B profile alteration by annealing in reactive ambients

dc.contributor.authorPawlak, Bartek
dc.contributor.authorCowern, N.E.B.
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-18T01:36:20Z
dc.date.available2021-10-18T01:36:20Z
dc.date.issued2009
dc.identifier.issn0003-6951
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16000
dc.sourceIIOimport
dc.titleB profile alteration by annealing in reactive ambients
dc.typeJournal article
dc.contributor.imecauthorPawlak, Bartek
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage22104
dc.source.journalApplied Physics Letters
dc.source.issue2
dc.source.volume94
dc.identifier.urlhttp://scitation.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=APPLAB000094000002022104000001&idtype=cvips&gifs=yes h
imec.availabilityPublished - open access


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