Germanium CMOS... Implantation, doping and defects

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Authors
Peaker, A.R.; Markevich, V.P.; Satta, Alessandra; Simoen, Eddy
Conference
ISTC/CSTIC. Symposium VIII: Emerging Semiconductor Technologies
Title
Germanium CMOS... Implantation, doping and defects
Publication type
Proceedings paper
Embargo date
9999-12-31
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