Show simple item record

Electrical characterization of InGaAs ultra-shallow junctions

dc.contributor.authorPetersen, Dirch H.
dc.contributor.authorHansen, Ole
dc.contributor.authorBoggild, Peter
dc.contributor.authorLin, Rong
dc.contributor.authorNielsen, Peter F.
dc.contributor.authorLin, Dennis
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorAlian, AliReza
dc.contributor.authorMerckling, Clement
dc.contributor.authorPenaud, Julien
dc.contributor.authorBrammertz, Guy
dc.contributor.authorGoossens, Jozefien
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorClarysse, Trudo
dc.date.accessioned2021-10-18T01:39:50Z
dc.date.available2021-10-18T01:39:50Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16010
dc.sourceIIOimport
dc.titleElectrical characterization of InGaAs ultra-shallow junctions
dc.typeProceedings paper
dc.contributor.imecauthorLin, Dennis
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorAlian, AliReza
dc.contributor.imecauthorMerckling, Clement
dc.contributor.imecauthorBrammertz, Guy
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.contributor.orcidimecBrammertz, Guy::0000-0003-1404-7339
dc.source.peerreviewno
dc.source.conferenceInternational Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling
dc.source.conferencedate26/04/2009
dc.source.conferencelocationNapa, CA USA
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record