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Review of electrical characterization of ultra-shallow junctions with micro four-point probes

dc.contributor.authorPetersen, Dirch H.
dc.contributor.authorHansen, Ole
dc.contributor.authorHansen, Torben M.
dc.contributor.authorBoggild, Peter
dc.contributor.authorLin, Rong
dc.contributor.authorKjaer, Daniel
dc.contributor.authorNielsen, Peter F.
dc.contributor.authorClarysse, Trudo
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorRosseel, Erik
dc.contributor.authorBennett, Nick S.
dc.contributor.authorCowern, Nick E.B.
dc.date.accessioned2021-10-18T01:40:14Z
dc.date.available2021-10-18T01:40:14Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16011
dc.sourceIIOimport
dc.titleReview of electrical characterization of ultra-shallow junctions with micro four-point probes
dc.typeProceedings paper
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorRosseel, Erik
dc.source.peerreviewno
dc.source.conferenceInternational Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling
dc.source.conferencedate26/04/2009
dc.source.conferencelocationNapa, CA USA
imec.availabilityPublished - imec


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