IMEC's strategy and activity on MEMS
dc.contributor.author | Pieters, Philip | |
dc.date.accessioned | 2021-10-18T01:43:29Z | |
dc.date.available | 2021-10-18T01:43:29Z | |
dc.date.issued | 2009 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/16020 | |
dc.source | IIOimport | |
dc.title | IMEC's strategy and activity on MEMS | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Pieters, Philip | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.conference | Symposium 'The State of the Art of Integrated MEMS Technology for Industrialisation' | |
dc.source.conferencedate | 31/03/2009 | |
dc.source.conferencelocation | Tsukuba Japan | |
imec.availability | Published - open access |