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Versatile MEMS and MEMS integration technology platforms for cost effective MEMS development

dc.contributor.authorPieters, Philip
dc.date.accessioned2021-10-18T01:43:47Z
dc.date.available2021-10-18T01:43:47Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16021
dc.sourceIIOimport
dc.titleVersatile MEMS and MEMS integration technology platforms for cost effective MEMS development
dc.typeProceedings paper
dc.contributor.imecauthorPieters, Philip
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conference17th European Microelectronics and Packaging Conference & Exhibition - EMPC
dc.source.conferencedate15/06/2009
dc.source.conferencelocationRimini Italy
imec.availabilityPublished - open access


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