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Developing new MEMS opportunities by employing CMOS processing and manufacturing methodologies

dc.contributor.authorPieters, Philip
dc.date.accessioned2021-10-18T01:44:04Z
dc.date.available2021-10-18T01:44:04Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16022
dc.sourceIIOimport
dc.titleDeveloping new MEMS opportunities by employing CMOS processing and manufacturing methodologies
dc.typeOral presentation
dc.contributor.imecauthorPieters, Philip
dc.source.peerreviewno
dc.source.conferenceSemicon West "Extreme Electronics TechXPOT: Strategies to Improve Profits in MEMS"
dc.source.conferencedate15/07/2009
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec


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