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Modeling of alternative high-k dielectrics for memory based applications

dc.contributor.authorPourtois, Geoffrey
dc.contributor.authorClima, Sergiu
dc.contributor.authorSankaran, Kiroubanand
dc.contributor.authorDelugas, Pietro
dc.contributor.authorFiorentini, Vincenzo
dc.contributor.authorMagnus, Wim
dc.contributor.authorSoree, Bart
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorVan Houdt, Jan
dc.contributor.authorWouters, Dirk
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorHeyns, Marc
dc.contributor.authorKittl, Jorge
dc.date.accessioned2021-10-18T01:54:55Z
dc.date.available2021-10-18T01:54:55Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16052
dc.sourceIIOimport
dc.titleModeling of alternative high-k dielectrics for memory based applications
dc.typeProceedings paper
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.imecauthorClima, Sergiu
dc.contributor.imecauthorSankaran, Kiroubanand
dc.contributor.imecauthorMagnus, Wim
dc.contributor.imecauthorSoree, Bart
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.contributor.orcidimecClima, Sergiu::0000-0002-4044-9975
dc.contributor.orcidimecSankaran, Kiroubanand::0000-0001-6988-7269
dc.contributor.orcidimecSoree, Bart::0000-0002-4157-1956
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage131
dc.source.endpage145
dc.source.conferenceHigh Dielectric Constant Materials and Gate Stacks 7
dc.source.conferencedate4/10/2009
dc.source.conferencelocationVienna Austria
imec.availabilityPublished - open access
imec.internalnotesECS Transactions; Vol. 25, issue 6


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