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Effect of airgap deep trench isolation on the gamma radiation behavior of a 0.13um SiGe:C NPN HBT technology
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Authors
Put, Sofie
;
Simoen, Eddy
;
Van Huylenbroeck, Stefaan
;
Claeys, Cor
;
Van Uffelen, Marco
;
Leroux, Paul
ISSN
0018-9499
Issue
4
Journal
IEEE Transactions on Nuclear Science
Volume
56
Title
Effect of airgap deep trench isolation on the gamma radiation behavior of a 0.13um SiGe:C NPN HBT technology
Publication type
Journal article
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