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Effect of airgap deep trench isolation on the gamma radiation behavior of a 0.13um SiGe:C NPN HBT technology

dc.contributor.authorPut, Sofie
dc.contributor.authorSimoen, Eddy
dc.contributor.authorVan Huylenbroeck, Stefaan
dc.contributor.authorClaeys, Cor
dc.contributor.authorVan Uffelen, Marco
dc.contributor.authorLeroux, Paul
dc.date.accessioned2021-10-18T01:58:47Z
dc.date.available2021-10-18T01:58:47Z
dc.date.issued2009
dc.identifier.issn0018-9499
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16063
dc.sourceIIOimport
dc.titleEffect of airgap deep trench isolation on the gamma radiation behavior of a 0.13um SiGe:C NPN HBT technology
dc.typeJournal article
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorVan Huylenbroeck, Stefaan
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecVan Huylenbroeck, Stefaan::0000-0001-9978-3575
dc.source.peerreviewyes
dc.source.beginpage2198
dc.source.endpage2204
dc.source.journalIEEE Transactions on Nuclear Science
dc.source.issue4
dc.source.volume56
imec.availabilityPublished - imec


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