Copper plating on resistive substrates, diffusion barrier and alternative seed layers

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Authors
Radisic, Alex; Nagar, Magi; Strubbe, Katrien; Armini, Silvia; El-Mekki, Zaid; Volders, Henny; Ruythooren, Wouter; Vereecken, Philippe
Conference
216th ECS Meeting
Title
Copper plating on resistive substrates, diffusion barrier and alternative seed layers
Publication type
Meeting abstract
Embargo date
9999-12-31
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