Recombination of O and H atoms on the surface of nanoporous dielectrics

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Authors

Rakhimova, Tatyana; Braginsky, Oleg; Kovalev, Alexander; Lopaev, Dmutry; Mankelevich, Yuri; Malykhin, E; Rakhimov, Alexander; Vasilieva, Anna; Zyryanov, Sergei; Baklanov, Mikhaïl

ISSN

0093-3813

Issue

9

Journal

IEEE Transactions on Plasma Science

Volume

37

Title

Recombination of O and H atoms on the surface of nanoporous dielectrics

Publication type

Journal article

Embargo date

9999-12-31

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