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Recombination of O and H atoms on the surface of nanoporous dielectrics

dc.contributor.authorRakhimova, Tatyana
dc.contributor.authorBraginsky, Oleg
dc.contributor.authorKovalev, Alexander
dc.contributor.authorLopaev, Dmutry
dc.contributor.authorMankelevich, Yuri
dc.contributor.authorMalykhin, E
dc.contributor.authorRakhimov, Alexander
dc.contributor.authorVasilieva, Anna
dc.contributor.authorZyryanov, Sergei
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-18T02:09:25Z
dc.date.available2021-10-18T02:09:25Z
dc.date.issued2009
dc.identifier.issn0093-3813
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16088
dc.sourceIIOimport
dc.titleRecombination of O and H atoms on the surface of nanoporous dielectrics
dc.typeJournal article
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1697
dc.source.endpage1703
dc.source.journalIEEE Transactions on Plasma Science
dc.source.issue9
dc.source.volume37
imec.availabilityPublished - open access


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