Show simple item record

Characterization of a FinFET 6T-SRAM cell by tomography

dc.contributor.authorRichard, Olivier
dc.contributor.authorDemuynck, Steven
dc.contributor.authorVeloso, Anabela
dc.contributor.authorVan Marcke, Patricia
dc.contributor.authorBender, Hugo
dc.date.accessioned2021-10-18T02:15:41Z
dc.date.available2021-10-18T02:15:41Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16104
dc.sourceIIOimport
dc.titleCharacterization of a FinFET 6T-SRAM cell by tomography
dc.typeMeeting abstract
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.imecauthorVan Marcke, Patricia
dc.contributor.imecauthorBender, Hugo
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.source.peerreviewno
dc.source.conferenceMicroscopy of Semiconducting Materials XVI
dc.source.conferencedate17/03/2009
dc.source.conferencelocationOxford UK
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record