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Silicon optomechanics

dc.contributor.authorRoels, Joris
dc.contributor.authorVan Thourhout, Dries
dc.date.accessioned2021-10-18T02:22:43Z
dc.date.available2021-10-18T02:22:43Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16122
dc.sourceIIOimport
dc.titleSilicon optomechanics
dc.typeProceedings paper
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conference13th IEEE Photonics Society: Benelux Annual Workshop
dc.source.conferencedate11/09/2009
dc.source.conferencelocationEindhoven The Netherlands
imec.availabilityPublished - open access


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