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Study of sub-melt laser induced junction non-uniformities using Therma-Probe

dc.contributor.authorRosseel, Erik
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorClarysse, Trudo
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorOrtolland, Claude
dc.contributor.authorHoffmann, Thomas Y.
dc.contributor.authorSalnik, Alex
dc.contributor.authorHan, Sang-Hyun
dc.contributor.authorNicolaides, Lena
dc.date.accessioned2021-10-18T02:28:42Z
dc.date.available2021-10-18T02:28:42Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16138
dc.sourceIIOimport
dc.titleStudy of sub-melt laser induced junction non-uniformities using Therma-Probe
dc.typeProceedings paper
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.source.peerreviewno
dc.source.beginpage218
dc.source.endpage224
dc.source.conferenceInternational Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling
dc.source.conferencedate26/04/2009
dc.source.conferencelocationNapa USA
imec.availabilityPublished - imec


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