Authors

Rosseel, Erik; Bogdanowicz, Janusz; Clarysse, Trudo; Vandervorst, Wilfried; Salnik, Alex; Han, Sang-Hyun; Nicolaides, Lena

Conference

17th Annual IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP

Title

Study of sub-melt laser damage annealing using Therma-Probe

Publication type

Proceedings paper