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SiGe-based Grating Light Valve: A leap towards monolithic integration of MOEMS

dc.contributor.authorRudra, Sukumar
dc.contributor.authorRoels, Joris
dc.contributor.authorBryce, George
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorBaets, Roel
dc.contributor.authorVan Thourhout, Dries
dc.date.accessioned2021-10-18T02:30:28Z
dc.date.available2021-10-18T02:30:28Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16142
dc.sourceIIOimport
dc.titleSiGe-based Grating Light Valve: A leap towards monolithic integration of MOEMS
dc.typeMeeting abstract
dc.contributor.imecauthorBryce, George
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.imecauthorBaets, Roel
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.source.peerreviewno
dc.source.conference35th International Conference on Micro- and Nano Engineering - MNE
dc.source.conferencedate28/09/2009
dc.source.conferencelocationGent Belgium
imec.availabilityPublished - imec
imec.internalnotesfile 'P-MEMS-02' on CD, p66 in program guide


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