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Grating light valves: a SiGe based approach towards monolithic integration of MOEMS

dc.contributor.authorRudra, Sukumar
dc.contributor.authorRoels, Joris
dc.contributor.authorBryce, George
dc.contributor.authorSeveri, Simone
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorBaets, Roel
dc.contributor.authorVan Thourhout, Dries
dc.date.accessioned2021-10-18T02:30:52Z
dc.date.available2021-10-18T02:30:52Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16143
dc.sourceIIOimport
dc.titleGrating light valves: a SiGe based approach towards monolithic integration of MOEMS
dc.typeProceedings paper
dc.contributor.imecauthorBryce, George
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorBaets, Roel
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage109
dc.source.endpage112
dc.source.conferenceLEOS: 14th Annual Symposium of the IEEE Photonics Chapter Benelux
dc.source.conferencedate5/11/2009
dc.source.conferencelocationBrussels Belgium
imec.availabilityPublished - open access


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