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Mechanical response of electrostatic actuators under ESD stress

dc.contributor.authorSangameswaran, Sandeep
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorLinten, Dimitri
dc.contributor.authorScholz, Mirko
dc.contributor.authorThijs, Steven
dc.contributor.authorVan Hoof, Chris
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorGroeseneken, Guido
dc.date.accessioned2021-10-18T02:34:47Z
dc.date.available2021-10-18T02:34:47Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16153
dc.sourceIIOimport
dc.titleMechanical response of electrostatic actuators under ESD stress
dc.typeProceedings paper
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorLinten, Dimitri
dc.contributor.imecauthorThijs, Steven
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecLinten, Dimitri::0000-0001-8434-1838
dc.contributor.orcidimecThijs, Steven::0000-0003-2889-8345
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage2110
dc.source.endpage2113
dc.source.conferenceTransducers. 15th International Conference on Solid-State Sensors, Actuators and Microsystems
dc.source.conferencedate21/06/2009
dc.source.conferencelocationDenver, CO USA
imec.availabilityPublished - open access


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