dc.contributor.author | Sedky, Sherif | |
dc.contributor.author | Kamal, Ahmed | |
dc.contributor.author | Yomn, Mohannad | |
dc.contributor.author | Bakr, Hassan | |
dc.contributor.author | Ghannam, Rami | |
dc.contributor.author | Leonov, Vladimir | |
dc.contributor.author | Fiorini, Paolo | |
dc.date.accessioned | 2021-10-18T02:48:38Z | |
dc.date.available | 2021-10-18T02:48:38Z | |
dc.date.issued | 2009 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/16188 | |
dc.source | IIOimport | |
dc.title | Bi2Te3 as an active material for MEMS based devices fabricated at room temperature | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Leonov, Vladimir | |
dc.contributor.orcidimec | Leonov, Vladimir::0000-0002-4364-8945 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 1035 | |
dc.source.endpage | 1038 | |
dc.source.conference | Transducers. 15th International Conference on Solid-State Sensors, Actuators and Microsystems | |
dc.source.conferencedate | 14/06/2009 | |
dc.source.conferencelocation | Denver, CO USA | |
imec.availability | Published - open access | |