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Bi2Te3 as an active material for MEMS based devices fabricated at room temperature

dc.contributor.authorSedky, Sherif
dc.contributor.authorKamal, Ahmed
dc.contributor.authorYomn, Mohannad
dc.contributor.authorBakr, Hassan
dc.contributor.authorGhannam, Rami
dc.contributor.authorLeonov, Vladimir
dc.contributor.authorFiorini, Paolo
dc.date.accessioned2021-10-18T02:48:38Z
dc.date.available2021-10-18T02:48:38Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16188
dc.sourceIIOimport
dc.titleBi2Te3 as an active material for MEMS based devices fabricated at room temperature
dc.typeProceedings paper
dc.contributor.imecauthorLeonov, Vladimir
dc.contributor.orcidimecLeonov, Vladimir::0000-0002-4364-8945
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage1035
dc.source.endpage1038
dc.source.conferenceTransducers. 15th International Conference on Solid-State Sensors, Actuators and Microsystems
dc.source.conferencedate14/06/2009
dc.source.conferencelocationDenver, CO USA
imec.availabilityPublished - open access


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