Authors

Selvaraja, Shankar; Jaenen, Patrick; Bogaerts, Wim; Van Thourhout, Dries; Dumon, Pieter; Baets, Roel

Issue

18

Journal

IEEE Journal of Lightwave Technology

Volume

27

Title

Fabrication of photonic wire and crystal circuits in silicon-on-insulator using 193nm optical lithography

Publication type

Journal article

Embargo date

9999-12-31