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Mechanisms of film deposition from BCl3-based plasma during dry etching
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Authors
Shamiryan, Denis
;
Efremov, A.M.
;
Serlenga, V
;
Baklanov, Mikhaïl
;
Boullart, Werner
Conference
International Conference Micro- and Nanoelectronics - ICMNE
Title
Mechanisms of film deposition from BCl3-based plasma during dry etching
Publication type
Meeting abstract
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