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Atom probe microscopy of three-dimensional distribution of silicon isotopes in 28Si/30Si isotope superlattices with sub-nanometer spatial resolution
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Authors
Shimizu, Yasuo
;
Kawamura, Y.
;
Uematsu, M.
;
Itoh, Kohei M.
;
Tomita, Mitsuhiro
;
Sasaki, Mikio
;
Uchida, Hiroshi
;
Takahashi, Mamoru
ISSN
0021-8979
Issue
7
Journal
Journal of Applied Physics
Volume
106
Title
Atom probe microscopy of three-dimensional distribution of silicon isotopes in 28Si/30Si isotope superlattices with sub-nanometer spatial resolution
Publication type
Journal article
Embargo date
9999-12-31
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