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Atom probe microscopy of three-dimensional distribution of silicon isotopes in 28Si/30Si isotope superlattices with sub-nanometer spatial resolution

dc.contributor.authorShimizu, Yasuo
dc.contributor.authorKawamura, Y.
dc.contributor.authorUematsu, M.
dc.contributor.authorItoh, Kohei M.
dc.contributor.authorTomita, Mitsuhiro
dc.contributor.authorSasaki, Mikio
dc.contributor.authorUchida, Hiroshi
dc.contributor.authorTakahashi, Mamoru
dc.date.accessioned2021-10-18T03:00:08Z
dc.date.available2021-10-18T03:00:08Z
dc.date.issued2009
dc.identifier.issn0021-8979
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16217
dc.sourceIIOimport
dc.titleAtom probe microscopy of three-dimensional distribution of silicon isotopes in 28Si/30Si isotope superlattices with sub-nanometer spatial resolution
dc.typeJournal article
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage76102
dc.source.journalJournal of Applied Physics
dc.source.issue7
dc.source.volume106
imec.availabilityPublished - open access


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