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A DLTS study of Pt/Al2O3/InxGa1-xAs capacitors

dc.contributor.authorSimoen, Eddy
dc.contributor.authorBrammertz, Guy
dc.contributor.authorPenaud, Julien
dc.contributor.authorMerckling, Clement
dc.contributor.authorLin, Dennis
dc.contributor.authorWang, Wei-E
dc.contributor.authorMeuris, Marc
dc.date.accessioned2021-10-18T03:04:16Z
dc.date.available2021-10-18T03:04:16Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16224
dc.sourceIIOimport
dc.titleA DLTS study of Pt/Al2O3/InxGa1-xAs capacitors
dc.typeProceedings paper
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorBrammertz, Guy
dc.contributor.imecauthorMerckling, Clement
dc.contributor.imecauthorLin, Dennis
dc.contributor.imecauthorMeuris, Marc
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecBrammertz, Guy::0000-0003-1404-7339
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage151
dc.source.endpage161
dc.source.conferenceAnalytical Techniques for Semiconductor Materials and Process Characterization 6 - ALTECH
dc.source.conferencedate4/10/2009
dc.source.conferencelocationVienna Austria
imec.availabilityPublished - open access
imec.internalnotesECS Transactions; Vol. 25, Issue 3


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