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Impact of the chemical concentration on the solid-phase epitaxial regrowth of phosphorus implanted preamorphized germanium

dc.contributor.authorSimoen, Eddy
dc.contributor.authorBrugere, Antoine
dc.contributor.authorSatta, Alessandra
dc.contributor.authorFirrincieli, Andrea
dc.contributor.authorVan Daele, Benny
dc.contributor.authorBrijs, Bert
dc.contributor.authorRichard, Olivier
dc.contributor.authorGeypen, Jef
dc.contributor.authorMeuris, Marc
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-18T03:05:39Z
dc.date.available2021-10-18T03:05:39Z
dc.date.issued2009
dc.identifier.issn0021-8979
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16227
dc.sourceIIOimport
dc.titleImpact of the chemical concentration on the solid-phase epitaxial regrowth of phosphorus implanted preamorphized germanium
dc.typeJournal article
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorFirrincieli, Andrea
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorGeypen, Jef
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage93538
dc.source.journalJournal of Applied Physics
dc.source.issue9
dc.source.volume105
imec.availabilityPublished - open access


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