Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Articles
Impact of the chemical concentration on the solid-phase epitaxial regrowth of phosphorus implanted preamorphized germanium
Publication:
Impact of the chemical concentration on the solid-phase epitaxial regrowth of phosphorus implanted preamorphized germanium
Copy permalink
Date
2009
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
18441.pdf
251.52 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Simoen, Eddy
;
Brugere, Antoine
;
Satta, Alessandra
;
Firrincieli, Andrea
;
Van Daele, Benny
;
Brijs, Bert
;
Richard, Olivier
;
Geypen, Jef
;
Meuris, Marc
;
Vandervorst, Wilfried
Journal
Journal of Applied Physics
Abstract
Description
Metrics
Views
1894
since deposited on 2021-10-18
2
last month
Acq. date: 2025-12-10
Citations
Metrics
Views
1894
since deposited on 2021-10-18
2
last month
Acq. date: 2025-12-10
Citations