Publication:

Impact of the chemical concentration on the solid-phase epitaxial regrowth of phosphorus implanted preamorphized germanium

Date

2009
Journal article
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dc.contributor.authorSimoen, Eddy
dc.contributor.authorBrugere, Antoine
dc.contributor.authorSatta, Alessandra
dc.contributor.authorFirrincieli, Andrea
dc.contributor.authorVan Daele, Benny
dc.contributor.authorBrijs, Bert
dc.contributor.authorRichard, Olivier
dc.contributor.authorGeypen, Jef
dc.contributor.authorMeuris, Marc
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorFirrincieli, Andrea
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorGeypen, Jef
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.accessioned2021-10-18T03:05:39Z
dc.date.available2021-10-18T03:05:39Z
dc.date.embargo9999-12-31
dc.date.issued2009
dc.identifier.issn0021-8979
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16227
dc.source.beginpage93538
dc.source.issue9
dc.source.journalJournal of Applied Physics
dc.source.volume105
dc.title

Impact of the chemical concentration on the solid-phase epitaxial regrowth of phosphorus implanted preamorphized germanium

dc.typeJournal article
dspace.entity.typePublication
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