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Impact of the chemical concentration on the solid-phase epitaxial regrowth of phosphorus implanted preamorphized germanium
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Impact of the chemical concentration on the solid-phase epitaxial regrowth of phosphorus implanted preamorphized germanium
Date
2009
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Simoen, Eddy
;
Brugere, Antoine
;
Satta, Alessandra
;
Firrincieli, Andrea
;
Van Daele, Benny
;
Brijs, Bert
;
Richard, Olivier
;
Geypen, Jef
;
Meuris, Marc
;
Vandervorst, Wilfried
Journal
Journal of Applied Physics
Abstract
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1891
since deposited on 2021-10-18
Acq. date: 2025-10-24
Citations
Metrics
Views
1891
since deposited on 2021-10-18
Acq. date: 2025-10-24
Citations