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Impact of the chemical concentration on the solid-phase epitaxial regrowth of phosphorus implanted preamorphized germanium

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1897 since deposited on 2021-10-18
1last month
Acq. date: 2026-08-05

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Views

1897 since deposited on 2021-10-18
1last month
Acq. date: 2026-08-05

Citations